Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9732416 | Wafer chuck with aerodynamic design for turbulence reduction | Craig P. Stephens, Matt Kanetomi, Joseph Richardson, Chris Veazey | 2017-08-15 |
| 9685353 | Apparatus and method for edge bevel removal of copper from silicon wafers | Kousik Ganesan, Shantinath Ghongadi, Tariq Majid, Steven T. Mayer | 2017-06-20 |