Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816193 | Configuration and method of operation of an electrodeposition system for improved process stability and performance | Kousik Ganesan, Tighe A. Spurlin, Jonathan D. Reid, Shantinath Ghongadi, Andrew John McKerrow | 2017-11-14 |
| 9816196 | Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte | Tighe A. Spurlin, Charles Merrill, Ludan Huang, Matthew Thorum, Lee J. Brogan +9 more | 2017-11-14 |
| 9809898 | Electroplating and post-electrofill systems with integrated process edge imaging and metrology systems | Daniel Mark Dinneen | 2017-11-07 |