MT

Matthew Thorum

Lam Research: 2 patents #78 of 396Top 20%
NS Novellus Systems: 1 patents #34 of 90Top 40%
Overall (2017): #67,422 of 506,227Top 15%
3
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9816196 Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte Tighe A. Spurlin, Charles Merrill, Ludan Huang, Lee J. Brogan, James E. Duncan +9 more 2017-11-14
9689083 TSV bath evaluation using field versus feature contrast Lee J. Brogan, Steven T. Mayer, Joseph Richardson, David W. Porter, Haiying Fu 2017-06-27
9617648 Pretreatment of nickel and cobalt liners for electrodeposition of copper into through silicon vias Steven T. Mayer 2017-04-11