Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834852 | Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating | Steven T. Mayer, Bryan L. Buckalew, Thomas A. Ponnuswamy, Hilton Diaz Camilo, Robert Rash +1 more | 2017-12-05 |
| 9816196 | Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte | Tighe A. Spurlin, Charles Merrill, Ludan Huang, Matthew Thorum, Lee J. Brogan +9 more | 2017-11-14 |
| 9746427 | Detection of plating on wafer holding apparatus | Steven T. Mayer, Thomas A. Ponnuswamy, Bryan L. Buckalew | 2017-08-29 |
| 9689083 | TSV bath evaluation using field versus feature contrast | Lee J. Brogan, Steven T. Mayer, Matthew Thorum, Joseph Richardson, David W. Porter | 2017-06-27 |