| 9834852 |
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating |
Steven T. Mayer, Bryan L. Buckalew, Haiying Fu, Thomas A. Ponnuswamy, Hilton Diaz Camilo +1 more |
2017-12-05 |
| 9828688 |
Methods and apparatus for wetting pretreatment for through resist metal plating |
Bryan L. Buckalew, Steven T. Mayer, Thomas A. Ponnuswamy, Brian Paul Blackman, Doug Higley |
2017-11-28 |
| 9752248 |
Methods and apparatuses for dynamically tunable wafer-edge electroplating |
Burhanuddin Kagajwala, Bryan L. Buckalew, Aaron Berke, James Isaac Fortner |
2017-09-05 |
| 9721800 |
Apparatus for wetting pretreatment for enhanced damascene metal filling |
Steven T. Mayer, David W. Porter, Mark J. Willey |
2017-08-01 |
| 9624592 |
Cross flow manifold for electroplating apparatus |
Richard Abraham, Steven T. Mayer, Bryan L. Buckalew |
2017-04-18 |
| 9617652 |
Bubble and foam solutions using a completely immersed air-free feedback flow control valve |
Richard Abraham, David W. Porter, Steven T. Mayer, John Floyd Ostrowski |
2017-04-11 |
| 9567685 |
Apparatus and method for dynamic control of plated uniformity with the use of remote electric current |
Burhanuddin Kagajwala, Bryan L. Buckalew, Steven T. Mayer, Lee Peng Chua, Aaron Berke +1 more |
2017-02-14 |
