Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761416 | Apparatus and methods for reducing particles in semiconductor process chambers | Andrew Nguyen, Shahid Rauf, Ajit Balakrishna, Tom K. Cho, Kenneth S. Collins +3 more | 2017-09-12 |
| 9543163 | Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process | Mang-Mang Ling, Jungmin Ko, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani | 2017-01-10 |