Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543163 | Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process | Jungmin Ko, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani, Bradley J. Howard | 2017-01-10 |