Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837281 | Cyclic doped aluminum nitride deposition | Dieter Pierreux, Werner Knaepen | 2017-12-05 |
| 9812320 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Steven R. A. Van Aerde, Suvi Haukka +2 more | 2017-11-07 |
| 9799509 | Cyclic aluminum oxynitride deposition | Dieter Pierreux, Werner Knaepen | 2017-10-24 |
| 9711351 | Process for densifying nitride film | Dieter Pierreux | 2017-07-18 |
| 9576790 | Deposition of boron and carbon containing materials | Viljami Pore, Yosuke Kimura, Kunitoshi Namba, Wataru Adachi, Hideaki Fukuda +2 more | 2017-02-21 |
| 9552979 | Cyclic aluminum nitride deposition in a batch reactor | Werner Knaepen, Dieter Pierreux, Peter Zagwijn, Hessel Sprey, Cornelius A. van der Jeugd +4 more | 2017-01-24 |