Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837271 | Process for forming silicon-filled openings with a reduced occurrence of voids | Steven R. A. Van Aerde, Theodorus G.M. Oosterlaken, Frank Huussen | 2017-12-05 |
| 9552979 | Cyclic aluminum nitride deposition in a batch reactor | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Peter Zagwijn, Hessel Sprey +4 more | 2017-01-24 |