Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842739 | Method and structure for enabling high aspect ratio sacrificial gates | Kangguo Cheng, Ryan O. Jung, Fee Li Lie, John R. Sporre, Sean Teehan | 2017-12-12 |
| 9754942 | Single spacer for complementary metal oxide semiconductor process flow | Marc A. Bergendahl, Kangguo Cheng, Jessica Dechene, Fee Li Lie, Eric R. Miller +2 more | 2017-09-05 |
| 9748146 | Single spacer for complementary metal oxide semiconductor process flow | Marc A. Bergendahl, Kangguo Cheng, Jessica Dechene, Fee Li Lie, Eric R. Miller +2 more | 2017-08-29 |
| 9716184 | Enabling large feature alignment marks with sidewall image transfer patterning | Kangguo Cheng, Sivananda K. Kanakasabapathy, Fee Li Lie, Eric R. Miller, John R. Sporre +1 more | 2017-07-25 |
| 9659779 | Method and structure for enabling high aspect ratio sacrificial gates | Kangguo Cheng, Ryan O. Jung, Fee Li Lie, John R. Sporre, Sean Teehan | 2017-05-23 |
| 9627277 | Method and structure for enabling controlled spacer RIE | Kangguo Cheng, Ryan O. Jung, Fee Li Lie, Eric R. Miller, John R. Sporre +1 more | 2017-04-18 |
| 9536744 | Enabling large feature alignment marks with sidewall image transfer patterning | Kangguo Cheng, Sivananda K. Kanakasabapathy, Fee Li Lie, Eric R. Miller, John R. Sporre +1 more | 2017-01-03 |