Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811897 | Defect observation method and defect observation device | Minoru Harada, Yuji Takagi, Takehiro Hirai, Hirohiko Kitsuki | 2017-11-07 |
| 9799112 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Minoru Harada, Fumihiko Fukunaga, Yuji Takagi | 2017-10-24 |
| 9685301 | Charged-particle radiation apparatus | Takehiro Hirai, Kenji Obara | 2017-06-20 |
| 9582875 | Defect analysis assistance device, program executed by defect analysis assistance device, and defect analysis system | Takehiro Hirai, Kenji Obara | 2017-02-28 |
| 9569836 | Defect observation method and defect observation device | Takehiro Hirai, Minoru Harada | 2017-02-14 |