Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841679 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Masafumi KOJIMA, Akiyoshi GOTO, Akinori Shibuya, Kei Yamamoto | 2017-12-12 |
| 9810981 | Pattern formation method, etching method, electronic device manufacturing method, and electronic device | Ryosuke Ueba, Naoya IGUCHI, Tsukasa Yamanaka, Naohiro TANGO, Michihiro SHIRAKAWA | 2017-11-07 |
| 9791777 | Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Michihiro SHIRAKAWA, Keiyu OU | 2017-10-17 |
| 9760003 | Pattern forming method and actinic-ray- or radiation-sensitive resin composition | Kaoru Iwato, Hidenori Takahashi, Shuji Hirano, Sou Kamimura | 2017-09-12 |
| 9709892 | Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same | Shohei Kataoka, Kaoru Iwato, Sou Kamimura, Toru Tsuchihashi, Yuichiro Enomoto +3 more | 2017-07-18 |
| 9551935 | Pattern forming method and resist composition | Shinji Tarutani, Toru Tsuchihashi, Sou Kamimura, Yuichiro Enomoto, Kana Fujii +3 more | 2017-01-24 |