Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709892 | Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same | Shohei Kataoka, Kaoru Iwato, Sou Kamimura, Yuichiro Enomoto, Kana Fujii +3 more | 2017-07-18 |
| 9632410 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, resist-coated mask blank, photomask and pattern forming method, and method for producing electronic device using them, and electronic device | Shuhei Yamaguchi, Tomotaka Tsuchimura | 2017-04-25 |
| 9563121 | Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the composition | Takeshi Inasaki, Takeshi Kawabata, Tomotaka Tsuchimura | 2017-02-07 |
| 9551935 | Pattern forming method and resist composition | Keita Kato, Shinji Tarutani, Sou Kamimura, Yuichiro Enomoto, Kana Fujii +3 more | 2017-01-24 |