Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798234 | Resin composition, resist film using same, resist-coated mask blank, resist pattern forming method, and photo mask | Tomotaka Tsuchimura, Natsumi Yokokawa | 2017-10-24 |
| 9632410 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, resist-coated mask blank, photomask and pattern forming method, and method for producing electronic device using them, and electronic device | Toru Tsuchihashi, Tomotaka Tsuchimura | 2017-04-25 |
| 9551928 | Actinic-ray- or radiation-sensitive resin composition and method of forming pattern therewith | Hisamitsu Tomeba, Mitsuhiro Fujita | 2017-01-24 |