Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798234 | Resin composition, resist film using same, resist-coated mask blank, resist pattern forming method, and photo mask | Tomotaka Tsuchimura, Shuhei Yamaguchi | 2017-10-24 |
| 9766547 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method of manufacturing electronic device using the same, and electronic device | Hiroo Takizawa, Shuji Hirano | 2017-09-19 |
| 9651863 | Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Hiroo Takizawa, Shuji Hirano, Wataru Nihashi | 2017-05-16 |
| 9551933 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device | Hiroo Takizawa, Shuji Hirano, Wataru Nihashi | 2017-01-24 |