Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9651863 | Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Hiroo Takizawa, Shuji Hirano, Natsumi Yokokawa | 2017-05-16 |
| 9551933 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device | Hiroo Takizawa, Shuji Hirano, Natsumi Yokokawa | 2017-01-24 |