Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766547 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method of manufacturing electronic device using the same, and electronic device | Hiroo Takizawa, Natsumi Yokokawa | 2017-09-19 |
| 9760003 | Pattern forming method and actinic-ray- or radiation-sensitive resin composition | Kaoru Iwato, Hidenori Takahashi, Sou Kamimura, Keita Kato | 2017-09-12 |
| 9651863 | Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Hiroo Takizawa, Natsumi Yokokawa, Wataru Nihashi | 2017-05-16 |
| 9612535 | Pattern forming method, electron beam- or extreme ultraviolet-sensitive resin composition, resist film using the same, method of manufacturing electronic device, and electronic device | Hiroo Takizawa | 2017-04-04 |
| 9551933 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device | Hiroo Takizawa, Natsumi Yokokawa, Wataru Nihashi | 2017-01-24 |