Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9563121 | Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the composition | Takeshi Inasaki, Tomotaka Tsuchimura, Toru Tsuchihashi | 2017-02-07 |
| 9557643 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same and electronic device | Hiroo Takizawa, Tomotaka Tsuchimura, Takuya TSURUTA | 2017-01-31 |