Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841679 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Masafumi KOJIMA, Akinori Shibuya, Keita Kato, Kei Yamamoto | 2017-12-12 |
| 9791777 | Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Masafumi KOJIMA, Michihiro SHIRAKAWA, Keita Kato, Keiyu OU | 2017-10-17 |
| 9551931 | Method of forming pattern, actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, process for manufacturing electronic device and electronic device | Junichi Ito, Akinori Shibuya, Michihiro SHIRAKAWA, Kei Yamamoto, Fumihiro YOSHINO | 2017-01-24 |