Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810981 | Pattern formation method, etching method, electronic device manufacturing method, and electronic device | Ryosuke Ueba, Naoya IGUCHI, Tsukasa Yamanaka, Naohiro TANGO, Keita Kato | 2017-11-07 |
| 9791777 | Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Keita Kato, Keiyu OU | 2017-10-17 |
| 9551931 | Method of forming pattern, actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, process for manufacturing electronic device and electronic device | Junichi Ito, Akinori Shibuya, Akiyoshi GOTO, Kei Yamamoto, Fumihiro YOSHINO | 2017-01-24 |