Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841679 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Masafumi KOJIMA, Akiyoshi GOTO, Keita Kato, Kei Yamamoto | 2017-12-12 |
| 9551931 | Method of forming pattern, actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, process for manufacturing electronic device and electronic device | Junichi Ito, Akiyoshi GOTO, Michihiro SHIRAKAWA, Kei Yamamoto, Fumihiro YOSHINO | 2017-01-24 |