Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846365 | Component for a radiation source, associated radiation source and lithographic apparatus | — | 2017-12-19 |
| 9823572 | Lithographic method | Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Gosse Charles De Vries, Erik Roelof Loopstra, Vadim Yevgenyevich Banine +8 more | 2017-11-21 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi +8 more | 2017-03-28 |