Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472394 | Method of forming silicon oxide film | Hiroki Murakami, Toshiyuki Ikeuchi, Jun Sato | 2016-10-18 |
| 9405289 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Tetsushi Ozaki, Sanjeev Kaushal, Sukesh Janubhai Patel | 2016-08-02 |
| 9390912 | Film forming method | Hiroki Murakami, Koji Sasaki, Keisuke Suzuki | 2016-07-12 |
| 9293543 | Film forming method and film forming apparatus | Shuji AZUMO, Yusaku Kashiwagi, Yu Wamura, Katsushige Harada, Kosuke Takahashi +3 more | 2016-03-22 |
| 9230799 | Method for fabricating semiconductor device and the semiconductor device | Akinobu Teramoto, Hiroshi Kambayashi, Hirokazu Ueda, Katsushige Harada, Kazuhide Hasebe +1 more | 2016-01-05 |