Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9405289 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Yuichiro Morozumi, Tetsushi Ozaki, Sanjeev Kaushal, Sukesh Janubhai Patel | 2016-08-02 |