Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9424528 | Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool | Sanjeev Kaushal, Kenji Sugishima | 2016-08-23 |
| 9405289 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Tetsushi Ozaki, Sanjeev Kaushal | 2016-08-02 |
| 9396443 | System and method for learning and/or optimizing manufacturing processes | Sanjeev Kaushal | 2016-07-19 |
| 9275335 | Autonomous biologically based learning tool | Sanjeev Kaushal, Kenji Sugishima | 2016-03-01 |