Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293543 | Film forming method and film forming apparatus | Shuji AZUMO, Yusaku Kashiwagi, Yuichiro Morozumi, Yu Wamura, Kosuke Takahashi +3 more | 2016-03-22 |
| 9234275 | Method and apparatus of forming metal compound film, and electronic product | Yoshihiro TAKEZAWA | 2016-01-12 |
| 9230799 | Method for fabricating semiconductor device and the semiconductor device | Akinobu Teramoto, Hiroshi Kambayashi, Hirokazu Ueda, Yuichiro Morozumi, Kazuhide Hasebe +1 more | 2016-01-05 |