Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9353442 | Apparatus for forming silicon-containing thin film | Mitsuhiro Okada, Akinobu Kakimoto | 2016-05-31 |
| 9343292 | Stacked semiconductor device, and method and apparatus of manufacturing the same | Tomoyuki Obu, Masaki Kurokawa | 2016-05-17 |
| 9263250 | Method and apparatus of forming silicon nitride film | Akinobu Kakimoto | 2016-02-16 |
| 9230799 | Method for fabricating semiconductor device and the semiconductor device | Akinobu Teramoto, Hiroshi Kambayashi, Hirokazu Ueda, Yuichiro Morozumi, Katsushige Harada +1 more | 2016-01-05 |