Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478396 | Charged particle beam exposure apparatus | Shinichi Hamaguchi, Shinji Sugatani, Akio Yamada | 2016-10-25 |
| 9425040 | Method of forming laminated film and forming apparatus thereof | Tomoyuki Obu, Hiroki IRIUDA | 2016-08-23 |
| 9343292 | Stacked semiconductor device, and method and apparatus of manufacturing the same | Kazuhide Hasebe, Tomoyuki Obu | 2016-05-17 |