Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490122 | Method and apparatus of forming carbon-containing silicon film | — | 2016-11-08 |
| 9425073 | Depression filling method and processing apparatus | Satoshi Onodera, Daisuke Suzuki | 2016-08-23 |
| 9353442 | Apparatus for forming silicon-containing thin film | Mitsuhiro Okada, Kazuhide Hasebe | 2016-05-31 |
| 9318328 | Method and apparatus for forming silicon film | Katsuhiko Komori, Mitsuhiro Okada, Nobuhiro Takahashi | 2016-04-19 |
| 9263250 | Method and apparatus of forming silicon nitride film | Kazuhide Hasebe | 2016-02-16 |