Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490139 | Method and apparatus for forming silicon film | Mitsuhiro Okada | 2016-11-08 |
| 9384974 | Trench filling method and processing apparatus | Daisuke Suzuki, Kazuya Takahashi, Mitsuhiro Okada, Satoshi Onodera | 2016-07-05 |
| 9318328 | Method and apparatus for forming silicon film | Akinobu Kakimoto, Mitsuhiro Okada, Nobuhiro Takahashi | 2016-04-19 |