Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9435026 | Film deposition apparatus | Tomonori Kuwamoto | 2016-09-06 |
| 9418837 | Semiconductor device manufacturing method and substrate treatment system | Koji Akiyama, Hirokazu Higashijima, Chihiro TAMURA, Shintaro Aoyama | 2016-08-16 |
| 9293543 | Film forming method and film forming apparatus | Shuji AZUMO, Yusaku Kashiwagi, Yuichiro Morozumi, Katsushige Harada, Kosuke Takahashi +3 more | 2016-03-22 |