Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478445 | Substrate liquid processing apparatus and method for detecting abnormality of air flow | — | 2016-10-25 |
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Yosuke Hachiya, Jun Nogami, Kotaro Ooishi, Itaru Kanno | 2016-06-28 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Jiro Higashijima, Nobuhiro Ogata, Shuichi Nagamine | 2016-05-31 |