Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484230 | Substrate liquid processing apparatus | Nobuhiro Ogata | 2016-11-01 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Jiro Higashijima, Norihiro Ito, Nobuhiro Ogata | 2016-05-31 |
| 9346084 | Liquid processing apparatus and liquid processing method | Yusuke Hashimoto | 2016-05-24 |
| 9275881 | Liquid processing apparatus, liquid processing method, and storage medium | Yusuke Hashimoto | 2016-03-01 |
| 9266153 | Substrate processing apparatus and substrate processing method | Yusuke Hashimoto | 2016-02-23 |