Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508569 | Substrate liquid processing apparatus | Shigehisa Inoue, Masami Akimoto | 2016-11-29 |
| 9396975 | Liquid treatment apparatus and method | Norihiro Itoh | 2016-07-19 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Norihiro Ito, Nobuhiro Ogata, Shuichi Nagamine | 2016-05-31 |