Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484230 | Substrate liquid processing apparatus | Shuichi Nagamine | 2016-11-01 |
| 9387520 | Liquid processing apparatus and cleaning method | Terufumi Wakiyama, Yoshihiro Kai, Ryouga Kamo, Yoshinori Ikeda | 2016-07-12 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Jiro Higashijima, Norihiro Ito, Shuichi Nagamine | 2016-05-31 |
| 9305767 | Liquid processing apparatus, liquid processing method and storage medium | Kenji Nishi, Kazuhiro Takeshita, Satoru Tanaka, Shogo Mizota | 2016-04-05 |