Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9346084 | Liquid processing apparatus and liquid processing method | Shuichi Nagamine | 2016-05-24 |
| 9275881 | Liquid processing apparatus, liquid processing method, and storage medium | Shuichi Nagamine | 2016-03-01 |
| 9266153 | Substrate processing apparatus and substrate processing method | Shuichi Nagamine | 2016-02-23 |