Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443712 | Substrate cleaning method and substrate cleaning system | Miyako Kaneko, Takehiko Orii | 2016-09-13 |
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Norihiro Ito, Yosuke Hachiya, Jun Nogami, Kotaro Ooishi | 2016-06-28 |
| 9362184 | Semiconductor device, manufacturing method of semiconductor device, semiconductor manufacturing and inspecting apparatus, and inspecting apparatus | Takahiko Kato, Hiroshi Nakano, Haruo Akahoshi, Yuuji Takada, Yoshimi Sudo +3 more | 2016-06-07 |