Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362184 | Semiconductor device, manufacturing method of semiconductor device, semiconductor manufacturing and inspecting apparatus, and inspecting apparatus | Takahiko Kato, Hiroshi Nakano, Haruo Akahoshi, Yuuji Takada, Tetsuo Fujiwara +3 more | 2016-06-07 |