Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Norihiro Ito, Yosuke Hachiya, Kotaro Ooishi, Itaru Kanno | 2016-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Norihiro Ito, Yosuke Hachiya, Kotaro Ooishi, Itaru Kanno | 2016-06-28 |