Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2016-11-08 |
| 9330891 | Plasma processing method and plasma processing apparatus | Ryo Nonaka, Masanori Sato, Natsuki Yabumoto, Takamitsu TAKAYAMA, Akitoshi Harada +1 more | 2016-05-03 |
| 9251998 | Plasma processing apparatus | — | 2016-02-02 |