Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330891 | Plasma processing method and plasma processing apparatus | Masanori Sato, Natsuki Yabumoto, Takamitsu TAKAYAMA, Akitoshi Harada, Junichi Sasaki +1 more | 2016-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330891 | Plasma processing method and plasma processing apparatus | Masanori Sato, Natsuki Yabumoto, Takamitsu TAKAYAMA, Akitoshi Harada, Junichi Sasaki +1 more | 2016-05-03 |