Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460896 | Plasma processing method and plasma processing apparatus | — | 2016-10-04 |
| 9330891 | Plasma processing method and plasma processing apparatus | Ryo Nonaka, Masanori Sato, Natsuki Yabumoto, Takamitsu TAKAYAMA, Junichi Sasaki +1 more | 2016-05-03 |