Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436086 | Anti-reflective layer and method | Ching-Yu Chang, Wen-Yun Wang | 2016-09-06 |
| 9362120 | Lithography process and composition with de-crosslinkable crosslink material | — | 2016-06-07 |
| 9349622 | Method and apparatus for planarization of substrate coatings | Wen-Yun Wang, Cheng-Han Wu, Ching-Yu Chang | 2016-05-24 |
| 9281192 | CMP-friendly coatings for planar recessing or removing of variable-height layers | Wen-Kuei Liu, Teng-Chun Tsai, Kao-Feng Liao, Yu-Ting Yen | 2016-03-08 |
| 9245751 | Anti-reflective layer and method | Ching-Yu Chang, Wen-Yun Wang | 2016-01-26 |