Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337066 | Wafer cleaning module | Yu-Ting Yen, Ying-Ho Chen | 2016-05-10 |
| 9281192 | CMP-friendly coatings for planar recessing or removing of variable-height layers | Wen-Kuei Liu, Teng-Chun Tsai, Yu-Ting Yen, Yu-Chung Su | 2016-03-08 |