Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478431 | BARC-assisted process for planar recessing or removing of variable-height layers | Teng-Chun Tsai, Kuo-Yin Lin, Shen-Nan Lee, Yu-Wei Chou, Kuo-Cheng Lien +3 more | 2016-10-25 |
| 9287127 | Wafer back-side polishing system and method for integrated circuit device manufacturing processes | Shen-Nan Lee, Teng-Chun Tsai, Hsin-Hsien Lu, Chang-Sheng Lin, Kuo-Cheng Lien +2 more | 2016-03-15 |
| 9281192 | CMP-friendly coatings for planar recessing or removing of variable-height layers | Teng-Chun Tsai, Kao-Feng Liao, Yu-Ting Yen, Yu-Chung Su | 2016-03-08 |
| 9236446 | Barc-assisted process for planar recessing or removing of variable-height layers | Teng-Chun Tsai, Kuo-Yin Lin, Shen-Nan Lee, Yu-Wei Chou, Kuo-Cheng Lien +3 more | 2016-01-12 |