Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478431 | BARC-assisted process for planar recessing or removing of variable-height layers | Wen-Kuei Liu, Teng-Chun Tsai, Kuo-Yin Lin, Shen-Nan Lee, Yu-Wei Chou +3 more | 2016-10-25 |
| 9466501 | Method and apparatus for improving CMP planarity | Hsin-Hsien Lu | 2016-10-11 |
| 9448372 | Optical coupling element and optical module having the same | Chao-Hung Tsai, Jian-Hong Luo, Li-Chieh Su | 2016-09-20 |
| 9415479 | Conductive chemical mechanical planarization polishing pad | Hsin-Hsien Lu | 2016-08-16 |
| 9287127 | Wafer back-side polishing system and method for integrated circuit device manufacturing processes | Shen-Nan Lee, Teng-Chun Tsai, Hsin-Hsien Lu, Kuo-Cheng Lien, Kuo-Yin Lin +2 more | 2016-03-15 |
| 9236446 | Barc-assisted process for planar recessing or removing of variable-height layers | Wen-Kuei Liu, Teng-Chun Tsai, Kuo-Yin Lin, Shen-Nan Lee, Yu-Wei Chou +3 more | 2016-01-12 |