Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466501 | Method and apparatus for improving CMP planarity | Chang-Sheng Lin | 2016-10-11 |
| 9434047 | Retainer ring | Kuo-Cheng Lien | 2016-09-06 |
| 9415479 | Conductive chemical mechanical planarization polishing pad | Chang-Sheng Lin | 2016-08-16 |
| 9287127 | Wafer back-side polishing system and method for integrated circuit device manufacturing processes | Shen-Nan Lee, Teng-Chun Tsai, Chang-Sheng Lin, Kuo-Cheng Lien, Kuo-Yin Lin +2 more | 2016-03-15 |