Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518927 | Surface-enhanced raman scattering substrate and manufacturing method thereof | Hsuen-Li Chen, Sin-Yi Chou, Chen-Chieh Yu | 2016-12-13 |
| 9337066 | Wafer cleaning module | Kao-Feng Liao, Ying-Ho Chen | 2016-05-10 |
| 9281192 | CMP-friendly coatings for planar recessing or removing of variable-height layers | Wen-Kuei Liu, Teng-Chun Tsai, Kao-Feng Liao, Yu-Chung Su | 2016-03-08 |