Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436086 | Anti-reflective layer and method | Yu-Chung Su, Ching-Yu Chang | 2016-09-06 |
| 9349622 | Method and apparatus for planarization of substrate coatings | Cheng-Han Wu, Yu-Chung Su, Ching-Yu Chang | 2016-05-24 |
| 9245751 | Anti-reflective layer and method | Yu-Chung Su, Ching-Yu Chang | 2016-01-26 |
| 9239520 | Photoresist defect reduction system and method | Ching-Yu Chang | 2016-01-19 |