Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448468 | Reflective mask blank and reflective mask, and methods for manufacturing reflective mask blank and reflective mask | Norihito Fukugami, Yo Sakata, Tooru Komizo, Takashi Haraguchi | 2016-09-20 |
| 9334424 | Temporary adhesive for wafer processing, member for wafer processing using the same, wafer processed body, and method for producing thin wafer | Michihiro Sugo, Shohei Tagami, Hiroyuki Yasuda, Hideto Kato | 2016-05-10 |
| 9263333 | Wafer processing laminate, wafer processing member, temporary adhering material for processing wafer, and manufacturing method of thin wafer | Michihiro Sugo, Hideto Kato, Shohei Tagami, Hiroyuki Yasuda | 2016-02-16 |